Imec has successfully completed the first wafer-scale fabrication of solid-state nanopores using extreme ultraviolet (EUV) lithography on 300mm wafers. This significant advancement marks a pivotal shift from laboratory-scale experimentation to a scalable platform for various biosensing applications, particularly in the fields of genomics and proteomics.
The introduction of solid-state nanopores has long been anticipated as a transformative technology in life sciences. Despite their potential, mass production faced challenges due to variability and integration difficulties. With this breakthrough, Imec is poised to enable high-throughput, complementary metal-oxide-semiconductor (CMOS)-compatible biosensor arrays. Such arrays could expedite advancements in personalized medicine, rapid diagnostics, and molecular data storage.
Imec’s fabrication process is capable of producing nanopores as small as approximately 10 nm, demonstrating high uniformity across the entire wafer. The potential for further enhancements could bring pore sizes below 5 nm, expanding the applications of these nanopores. Electrical and bio-molecular translocation characterization indicated a strong signal-to-noise ratio of 6.2, underscoring the technology’s effectiveness.
Ashesh Ray Chaudhuri, the first author and R&D project manager at Imec, emphasized the organization’s unique position to leverage EUV lithography, a technique traditionally reserved for memory and logic applications, in life sciences. “By utilizing our lithography infrastructure, we’ve demonstrated that solid-state nanopores can be fabricated at scale with the precision needed for molecular sensing,” Chaudhuri stated. This innovation opens new avenues for the development of high-throughput biosensor arrays that could have broad implications for healthcare and other sectors.
About Imec and Its Impact on Technology
Imec stands as a leading research and innovation hub in advanced semiconductor technologies. Based in Leuven, Belgium, the organization employs over 6,500 individuals dedicated to driving innovation across various domains, including computing, health, automotive, energy, and security. In 2024, Imec reported revenues of €1.034 billion, highlighting its significant role in the global semiconductor landscape.
The organization collaborates with major players across the semiconductor value chain, including technology companies, startups, and academic institutions. Through its IC-Link initiative, Imec provides comprehensive support to companies throughout the chip development journey, from initial concept to full-scale manufacturing.
As Imec continues to advance its research and development capabilities, the successful fabrication of solid-state nanopores could redefine the future of biosensing technologies, paving the way for groundbreaking applications in life sciences and beyond. For more information, visit www.imec-int.com.
